High cleanliness: ceramic material without metal ion pollution, smooth surface (Ra≤0.1μm), suitable for precision electronics, semiconductors.
Precision adsorption: uniform pores (5-50μm), adsorption force error <±2%, can absorb ultra-thin workpieces (0.05mm).
High temperature resistance: 300-600℃ high temperature resistance, low thermal expansion coefficient, small deformation at high temperature.
Corrosion resistance: acid and alkali resistance, plasma corrosion, life 3-5 years.
Insulation/low magnetism: alumina ceramic insulation is good (volume resistivity>10 µ Ω·cm), no magnetic interference.
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