High precision: plane, accurate size, stable support workpiece, ensure lithography and other process precision.
Heat stability: fast and uniform heat conduction, high temperature deformation, adapt to hot and cold processes.
Good wear resistance: high hardness, small wear, smooth surface, no damage to the workpiece and uniform absorption.
Corrosion resistance: acid and alkali resistance, plasma resistance, no corrosion, no pollution of the workpiece.
Customizable: structure, size can be changed to adapt to a variety of semiconductor equipment technology.
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