Semiconductor ceramic disc—the key carrier of semiconductor manufacturing

In the complex process of semiconductor manufacturing, semiconductor ceramic discs play an important role. Recently, when a well-known domestic semiconductor manufacturing company upgraded its production line, it introduced a batch of high-precision ceramic discs, which greatly improved the wafer positioning accuracy in the chip manufacturing process and increased the product yield by 5%. This case highlights the importance of semiconductor ceramic discs to the semiconductor industry.

Semiconductor ceramic discs are usually made of ceramic materials such as high-purity alumina. It has excellent flatness, such as the high-precision alumina ceramic carrier plate developed by Jiangsu General Semiconductor. The flatness error can be as low as ≤1µm/300mm, which can provide stable support for the wafer and ensure that the wafer always maintains a precise position in the nano-level chip manufacturing process. Its good thermal stability can accurately match the coefficient of thermal expansion with the silicon wafer in the high-temperature etching process of 800℃, avoid wafer warping, and escort the complex semiconductor manufacturing process. Moreover, the natural corrosion resistance of ceramic materials allows the ceramic disc to maintain its own stable performance in the face of various chemical etchants, ensuring the reliability of long-term use.

With the development of the semiconductor industry to smaller processes and higher integration, the requirements for the accuracy and stability of ceramic discs are also continuing to rise. Related companies are increasing investment in research and development, and by improving material formulas and optimizing manufacturing processes, they are continuously improving the performance of ceramic discs to help the semiconductor industry move to new heights.