Quick elimination of static electricity: with conductive structure /coating, it quickly removes static electricity, does not absorb wafers, and does not hurt the chip.
Ultra-clean: The ceramics are dense, no chips and impurities are not precipitated, and they can be used in semiconductor clean workshops.
Rigid performance: Made of ceramics such as alumina, it is hard, wear-resistant, high temperature resistant, corrosion-resistant, and stable for a long time.
Stable accuracy: thermal expansion and cooling are reduced, the processing is accurate, the positioning error is small when moving the wafer, and the chip manufacturing does not roll over.
Scene pass: vacuum, high temperature, corrosive semiconductor process (lithography, etching, etc.)
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