Aluminum oxide Bernoulli arm

1. No contact with wafers, zero damage

Support wafer with airflow (non-contact), no scratch, especially suitable for thin/sensitive chips, less dust, clean enough.

2. Antistatic and insulating

Ceramic itself is non-conductive, anti-electrostatic discharge; surface can be treated to conduct static electricity, not afraid of airflow friction and accumulation.

3. High temperature resistance, corrosion resistance

Can withstand 1200℃ high temperature (such as heat treatment process), do not react with acid and alkali, plasma, long-term use without deformation, not corroded.

4. move accurately and steadily

Airflow adjustment, micron suspension height, wafer does not shake (shaking <0.1mm); thermal expansion and contraction are small, positioning error is small (±0.005mm).